Supporting a broad range of industries requiring materials and services for nextgeneration product production. Oil diffusion pump pblseries ulvacs oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. Diffusion pump maintenance diffusion pumps require little maintenance. Oil diffusion pumps are still the most popular type of highvacuum pump because they are relatively inexpensive, highly reliable and very durable. The dij series of diffusion pumps is a 5stage oil diffusion pump with an improved gas throughput and stable high pressure in the range of 103 mbar. Information about dow corning diffusion pump fluid dow. Multistage roots pump that combine several stages providing high pumping speed. Agilent varian diffusion pumps vacuum science is our. When your process requires a pressure below that of a mechanical pump or mechanical pump and. The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar. Supervac diffusion pump oils are engineered to conform to international standards. Diffusion pumps as the worldwide diffusion pump market leader, varian produces the most comprehensive family of pumps, ranging from 2 in. A vacuum of 103 torr has removed a great many of the atmospheric molecules, but this is actually the level at which a vacuum diffusion pump begins to operate. Connection to the helium gas bottle with manual valve.
The pumping speed ranges from 2,400 ls to 33,000 ls and has a operating range of 101 to 107 mbar more. We recommend that the period in which pump inlet pressure is above 150 millitorr be kept as short as possible. Yet oil diffusion pumps require careful maintenance in order to sustain a high level of performance and maintain the integrity of the vacuum chamber. Oil diffusion vacuum pump pfl series ulvac products. Kt series oil diffusion pump oil diffusion pumpvacuum. Oil diffusion pumps are characterized by superior vacuum performance data and are welladapted as reliable components in medium vacuum and high vacuum systems due to their rugged design. Toshniwal deals with the tested and proven diffusion pumps from hsr ag took over from balzers ag in 2003 lichtenstein. Maintenance and troubleshooting of oil diffusion pumps agilent. After completing the pump, it was attached to a mechanical forepump, cold traps, a manifold and vacuum gauges. They are often described as semiorganic due to their molecular structure, which is composed of siliconoxygen instead of carboncarbon bonds. Inland vacuums silicone diffusion pump oils invoil 702, 704, and 705 are durable fluids designed for a variety of high vacuum applications and for fast pumping large volumes of gas. Invoil silicone diffusion pump oil vacuum pump oils.
Diffusion vacuum pumps busch vacuum solutions united states. Combine and optimize various portions of the class. The heated diffusion pump oil boils and its vapors expand rapidly up a center jetstack, christmas tree looking baffle system. Of all special properties their high thermal and chemical stability, caused by the strength of the siliconoxygen bond, are the most conspicuous. Oil diffusion pumps are still a widely used type of high vacuum pump. Manufacturer of vacuum pump diffusion vacuum pump, rotary high vacuum pumps, rotary piston vacuum pump and rotary vane vacuum pumps offered by. To ensure the satisfaction of our customers, our products are rigorously tested to ensure it reaches or exceeds all advertised specifications. Hhvs diffstack pumps are designed and manufactured to suit the needs of both industrial and laboratory applications. The edwards diffstak vapour diffusion pumps are compact, watercooled pumps with integral cooled baffles which provide exceptionally clean pumping. Santovac 5 polyphenyl ether diffusion pump oil, 500 mi. The diffusion pump is the most common type of pump for use in high vacuum applications. The main reasons for their continued use are their longevity the lack of other options.
Oil diffusion applications for oil diffusion pumps range from mass spectrometry and analytical instrumentation to nanotechology and research and development. Silicone based diffusion pump oil 1 gallon, same as dc704. The diffusion pumps are available with integral or pneumatic vacuum valves. These vapor jet pumps are one of the oldest and most reliable ways to create a vacuum. Methods for removing contaminants from diffusion pump silicone oil during operation and for reclaiming contaminated oil by highvacuum molecular distillation are. Instruction manual d r a f t 7 9 11 vacuum products division high throughput diffusion pumps hs16 hs20 hs32 nhs35 part no. This article will explain practical steps that can be taken to ensure. The difference is even greater in comparison with most organic fluids. An oil diffusion pump is used to achieve higher vacuum lower pressure than is possible by use of positive displacement pumps alone.
Agilent technologies diffusion pump operational manual. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and longterm reliability. It is considered our most effective teaching aide in high vacuum principles and techniques. The diffusion vacuum pump construction consists of an oil boiler connected to a central multistage jet assembly. When the oil view diffusion pump oil selection online becomes hot enough to vaporize, the oil vapors rise up the center of the pump and exit the nozzles at a downward angle. It made a successful debut in the teaching lab, providing a visual display of the inner workings of an oil diffusion pump. Silicone based diffusion pump oil 100 cc, same as dc704. Vacuum pump diffusion vacuum pump manufacturer from new. As part of inland vacuums ongoing research and development programs, we identified a series of diffusion pump fluids possessing the lubricity necessary to serve as premium mechanical pump fluids as well. Dow corning 705 diffusion pump fluid also makes ultraclean operation. Supervac oils is indias top manufacturer and supplier of a complete range of vacuum pump oils, required for diffusion pumps. Without a doubt, youll have questions on proper diffusion pump operation. At this point, the vacuum diffusion pump takes over to create.
A diffusion pump is a compact pump with a water cooling system. At the bottom, you can see the heaters that sit just below the oil. Although its use has been mainly associated within the highvacuum range down to 10. To download drawing data and i o data, advance user registration free is required. Educational guide to vacuum coating processing the oil diffusion pump often called the diff pump or dp is probably the most widely used highvacuum pump.
For for a superior fluid for use where ultra high vacuum is required, please see our information on. We specialize in offering high quality silicone diffusion pump oil backed by worldclass technical and customer support. Diffusion pump is an oilbased vacuum pump, that is used for obtaining different levels of vacuum even high vacuum of 10 powered 9 pascal. Instead, an ancillary mechanical roughing pump or forepump, capable of a modest level of pumping, first brings the pressure inside the vacuum diffusion chamber down to about 103 torr. Maintenance support is provided by highlytrained global teams who help to maintain pump, instrument and system productivity both inhouse, with dedicated factory service, and onsite. These pumps are very efficient and reliable and can be used. Acquiescent flange is cf standard with bolted type. These pumps are offered with integral manual or pneumatic high vacuum valves. These diffusion pump fluids have performed exceptionally well. These diffstack pumps are offered in sizes 65 mm, 114 mm, 150 mm, 250 mm, 500 mm and mm diameters. The design solution unfolded as a merger of three interrelated concepts. Diffusion pumps can be used only for clean pumping.
Since the diffusion pump cannot exhaust directly to atmospheric pressure, the fore pump is used to maintain proper discharge pressure conditions. It is very reliable and longlived, although when misused it can create a great deal of contamination in the processing chamber. A vacuum diffusion pump cannot begin its work with full atmospheric pressure inside the chamber. Agilent provides a range of expert services to support the ongoing productivity and accuracy of your vacuum equipment. The proven design ensures very low backstreaming, reduced outgassing and minimized sealing requirements. It is the popular for vacuum furnace and vacuum coating machine. Recommended vacuum oils for these applications include invoil 20, 30, and 40. The diffusion vacuum pump is an oil pump that contains an oil heating element, where its oil is heated to high temperatures while being held under vacuum through its foreline by the roughing pump. Diffusion pump fluids inland vacuum industries, inc. All agilent diffusion pumps, 704 silicone oil 1 gallon. High vacuum pump, diffusion pump, oil diffusion pumps. Founded in 2001, hsr ag is a manufacturer of vacuum pumps and. Diffusion pumps, new agilent technologies vhs 6 diffusion vacuum pump, 120 v, asa flange, standard cold cap, 85826301, new varian agilent vhs 6 diffusion vacuum pump, 120 v, asa flange, extended cold cap, 85826311, diffusion vacuum pump, varian vhs6, diff pump vhs, vhs diffusion pump, vhs6 diff pump, varian vhs 6 diffusion pump, varian diff pump, varian vhs. Those who do not have user registration please register from the user registration page.
Oil diffusion pump controls vacuum furnace engineering. Speed of oil diffusion pump do8001 with baffle and cod trap, pumping air 14 at the tate im d2, where mis the molecular weight. Expert diagnosis and repair field service ensure a fast and convenient. At this point, the vacuum diffusion pump takes over to create a vacuum ranging from 103 to 109 mbar.
K and kt series oil diffusion vacuum pump also called as oil booster has large pumping speed and high vacuum degree and long lifetime. Hence, these oils are compatible with all makes and models of diffusion pumps manufactured anywhere in the world. Mt705 diffusion pump fluid is a colorless to light straw, a single component for ultrahigh vacua in the range of 10e9 to 10e10 torr untrapped and 10e11 torr trapped. The vapor pressure and backstreaming rate of mt705 diffusion pump fluid are low enough that the use of traps or refrigeration may not be necessary for all ultrahigh and ultraclean vacuum applications. Welldesigned vacuum systems can approach uhv pressure without ln 2 traps when using this fluid for pressures in high vacuum ranges, cooled baffles are not needed exceptional oxidation stability with little tendency to increase in viscosity. A vacuum diffusion pump cannot begin its work with full. Even as turbomolecular vacuum pumps have displaced most small laboratory sized oil diffusion pumps these days because of perceived ease of use and cleanliness, most high vacuum heat treating furnaces still rely on a large oil diffusion pumps to generate the pressures below about 103 torr needed for many metal conditioning processes. Ulvac has drawn on a wealth of experience in evacuation technology to redesign the oil diffusion pumps meeting the demands of a new era. The heated oil is ejected from the jet assembly at supersonic speeds and the process gas molecules are entrained in the oil jet flow and transferred through the pump body by the heavier oil molecules momentum.